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The Project

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LIST OF PARTICIPANTS AND DESCRIPTION OF WORK

Network Title : Linking Micro and NanoTechnology CAD Tools to conventional packages

Network Short Title : ATOMCAD

Part A - The Participants

The Principal Contractor and the Members listed below shall be jointly and severally liable in the execution of work defined in Part B of this Annex :

The Principal Contractor

1. Centre National de la Recherche Scientifique (CNRS) established in France

The Members

2. National Microelectronics Research Centre (NMRC) established in Ireland
3. Consejo Superior de Investigationes Cientificas (CSIC) established in Spain
4. Sigmaplus (SP) established in France
5. Chalmers University of Technology (CUT) established in Sweden
6. Commissariat a l'Energie Atomique (CEA) established in France

The Principal Contractor and the Members are referred to jointly as "the Participants". 

Part B - The Joint Programme of Work

1 Project Objectives

The objective of the project is to set up a network of competences in Europe to introduce the use of atomic scale modelling and simulation techniques in the microelectronic industry and the nanosystem technology, at an equivalent level as in the USA. This objective will be attained by assembling the efforts of European teams and by linking available new generation of tools and integrating them within the existing conventional packages.

The project prepares the transition from micro to nano technologies. Its aim would be to start a collaborative effort :

• to collect the tools and methods already available,
• to organise these tools in the scope of hierarchical models,
• to implement the outcome into the conventional tools used in the semiconductor industry, by creating a common platform accessible via internet,
• to organise a training program, for engineers in the electronic industry and young graduate students, on the new concepts, models and tools.

The implementation within conventional tools can be achieved in two ways :

• by replacing empirical adjustable parameters in the conventional models by more physical parameters determined via the use of hierarchical models,
• by activating one or more levels of hierarchical models to solve specific problems.

Given the important human and time investment needed to perform this implementation, a collective effort should be undertaken. The purpose of the common work will be :

1 - to organise the exchange between the participants to raise their ability to treat complex problems, and to provide data to be injected in conventional tools in place of adjustable parameters,
2 - to organise the concerted linking of the packages of the new generation of TCAD tools, already developed by the participants, to the existing conventional tools,
3 - to organise a network of advanced competences to offer expertise to industrial partners who lack time to perform the job,
4 - to develop a nucleus for a Monitoring Module to be implemented later in the conventional tools,
5 - to create a common platform devoted to cooperative work and using multimedia facilities.

 To start with this ambitious program, the network proposal is to investigate the following fields related to microelectronic processes :

• Thin Film Silicon and Metal Oxidation ,
• Diffusion (conventional and enhanced diffusion) with the participation and formation of complexes, in particular after ion implantation
• Semiconductor and Metallic Thin Film Growth (homo and heteroepitaxial),
• Electrical and Mechanical properties of Interfaces,
• Thermo-Mechanical behaviour of devices.

2 Research Method

 The network methodological approach is based on four initiatives.

The collection of already available laboratory tools and methods constitutes the first initiative of the network. This initiative will be carried out on an exhaustive and comprehensive basis, including in particular tools and methods related to the VLSI design. The methods will be analyzed in terms of their effective application or their future applicability as software tools to be distributed in the industrial environment. For this purpose, the participants will examine in detail the models and approximations used and their impact on :

• the accuracy of the results,
• the human resources needed to succeed in developing the software tools, if not already developed,
• the computing facilities needed for their use. This last point includes the type of computer to be used, but also the computation time which is a crucial point in industrial applications.

 The conclusion of this first initiative will be the selection of a series of methods and tools out of the collection, taking into account the clear US advance in this field. This initiative is partially accomplished today since the participants are all involved in atomic scale simulations and have already used and developed such tools. However, making an exhaustive list of available methods and tools may be of great interest, as a prospective for the future investigations, to the participants as well as to other interested groups or companies.

 The second initiative is the organisation of selected methods and tools in the scope of hierarchical models and multi-scale simulations. Such a cascade modelling may start from ab initio quantum models and end with macroscopic models going through Molecular Dynamics and/or Monte Carlo technique. Other types of models can be inserted in the hierarchy but, at this stage, the network will focus on the above models. In cascade modelling and multi-scale simulation, lower level models :

• address larger size systems, in terms of number of atoms treated,
• allow simulations on longer experiment duration,
• necessitate less computing facilities, in terms of hardware and computing time.

The counterpart is that lower level types of models need physical parameters. These can be determined from higher level types of models and injected into lower level models, if they are not available by direct experimental measurements or taken as semi empirical adjustable parameters.

The third initiative concerns the implementation of the selected softwares within existing conventional TCAD tools. According to the specific level of each individual selected package, the methodological approach will be different. If large computer facilities, in terms of hardware or computing time, are needed, the package will only be applied to specific simplified problems in order to determine physical parameters needed for lower level softwares. On the other hand, if the necessary computing facilities are compatible with those existing in the industrial environments, the software package will be directly integrated into the conventional tools. This initiative will be carried out by the participants, in close relation with industrial partners, such as participating SME' s. The integration will be achieved via additional modules which can automatically activate the software for specific problems. The nature of these specific problems will be subject to discussion within the network, and with external partners, to optimise their use in industrial applications.

The fourth initiative deals with the training programme.The objective is :

• to assemble high level scientists, in order to exchange complementary views,
• to create a network of specialists, at the same level as in the US, to initiate a fruitfull discussion,
• to train engineers to become familiar with the new tools,
• to prepare university lecturers to introduce new concepts and tools within the traditional courses.

 The approach will concern both engineers already in manufacturing units, in charge of technology simulation and design of new devices, as well as young postgraduate students intending to join the electronic industry. The programme will include :

• short courses at postgraduate level to provide background concepts of atomistic modelling, the means to reach the simulation objectives and the main TCAD tools available,
• organisation of international and european conferences to enhance exchanges between senior scientists, members of the network or outside partners, and from the industrial world. These meetings would be an opportunity to present the recent advances of atomic scale simulation in microelectronics and nanosystem fabrication, and to discuss their opportunities and their potentialities for an integration into conventional tools.

3 Work Plan

The work plan can be broken into four vertical tasks and four horizontal actions.

* Schedule and Milestones

1 - The first task (T1) is the Software Development. Its objective is to improve the tools already developed by the participants in four directions :

• taking new effects and mechanisms into account, via an extension of the previous work,
• assembling different complementary point of views and methods used by different network members in the same field of investigation,
• making the packages more user friendly for a wide dissemination,
• adapting the tools for a treatment by the subsequent tasks.

This first task will be started by senior scientists from each participant and will be completed by PhD students and postdocs under the supervision of the former senior scientists. This task will last during the total length of the project, since PhD students need a minimum of three years research. The task leader will be NMRC.

The first list of the fields investigated by the network members is as follows :

• Thin Film Oxidation of Silicon (LAAS, CEA, SIGMAPLUS) and Metals (Chalmers Univ.) ,
• Diffusion (conventional and enhanced diffusion), in particular after ion implantation (NMRC, LAAS)
• Thin Film Growth (homo and heteroepitaxial) of Semiconductors and Metals (LAAS, Chalmers Univ.),
• Properties of Interfaces : Electrical (NMRC) and Mechanical (Chalmers Univ.),
• Thermo-Mechanical behaviour of devices (Chalmers Univ.).

2 - The second task (T2) is the Software Interfaces Development. It concerns the development of interfaces between the softwares available in the network and the conventional tools. This is the most important part to be implemented. It will be performed through a close collaboration between the participants involved in each application field and the SME SIGMAPLUS who has a long experience in commercial software development and dissemination. This task will last 24 months, but the first interfaces should be available 15 months after the start of the network project.The task leader will be SIGMAPLUS.

3 - The third task (T3) is the Internal Dissemination and Multimedia Support. It deals with the installation of packages on co-operative networks, such that the tools are available through distributed multimedia systems. This will give the possibility of working at distance, but in close contact with the group where the software has been developed. This second task will begin at 18 months and will be accomplished at 36 months from the start of the network project.The task leader will be LAAS-CNRS.

4 - The fourth task (T4) is the Usability Demonstration. It illustrates the co-operative network by showing examples where several complemenbtary softwares, installed in various laboratories, may be used simultaneously with competent persons present at each site. This task will be finished after 48 months, at the end of the network project. The demonstration examples will be chosen out of the list of investigation fields reported above (in task1).The task leader will be CNM.

In parallel, four horizontal actions which are either prospective or executed on limited periods of time, will be undertaken.

1 - The first action (A1) is the Models and Tools Inventory. It is devoted to the collection of available atomistic models and tools not used inside the network. The goal is to present a list of new fields which could be integrated into a second stage of this programme. The set up of the list will be done during the first half of the network project and will be completed after 24 months. The new list of prospective fields of investigation will be established after 36 months.The action leader will be NMRC.

2 - The second action (A2) is the Training Programme. Regular summer schools related to the first fields of investigation listed above will be organised both for engineers already in the industry, and for the students who intend to join the electronic industry. These will be one week seminars and will deal with the basic approaches and available tools. Two summer schools, at the Mid Term and at the End of the project are programmed. The action leader will be Chalmers University.

3 - The third action (A3) concerns the External Dissemination of Tools. It is achieved through the organisation of international and european conferences to update the education of engineers involved in the use of TCAD tools by presenting the latest advances in the field. The network anticipates an international conference at the Mid Term of the project and a european or international conference at the end of the project. The action leader will be the executive committee, as defined in part 4 of this project.

4 - The fourth action (A4) is the Progress Survey. Regular annual 2-day meetings between the network members to check the progress of the programme are anticipated. Meanwhile, members sharing one or few of the five fields of investigation (see task 1), will have informal meetings, especially through young researchers who have to travel intensively between participating groups. The action leader will be the executive committee, as defined in part 4 of this project.

Figure 1 illustrates the structure of the proposed network in terms of vertical tasks and horizontal actions. The timetable of the project execution is reported in Figure 2.

* Research Effort of the Participants

 Table 1 shows the professional research effort of the participants in this network project

	Participant	Young researchers to be financed by the contract (person-months) (a)	Researchers to be financed from other sources (person-months) (b)	Researchers likely to contribute to the project (number of individuals)
1	LAAS-CNRS	48	260	10
2	NMRC	45	220	5
3	CNM	50	220	7
4	SP	14	48	3
5	CUT	33	180	6
6	CEA-DAM	14	48	3
	Totals	204	976	34

 4 Organisation and Management

The management is performed via the Executive Committee, composed of scientists in charge of the network from each participants.

The role of the Executive Committee is :

• - to examine and to approve the progress report,
• - to supervise the progress of the network,
• - to point out the eventual deficiencies and bottlenecks in achieveing the tasks,
• - to propose the means to overcome these difficulties.

The Executive Committee will meet once every year concommittent to the 2-day meeting of participantsi. Its appreciations will be based on :

• - the examination of the progress report,
• - the presentations, during the 2-day meeting, of the individual and collective work by network members,
• - the discussions within the executive committee on the international trends and the eventual reinforcement and/or reorientation of the tasks.

Regular progress reports on the activities of network members, together with the general trends of the network and the prospective actions, will be published every year. This progress report will be forwarded to the European Commission, to the members of the Executive Committee and to the participants to the network.

The industrial dissemination will be achieved through :

• the implementation of tools on a platform for co-operative network using multimedia systems, where effective help will be available for industries interested in using the available tools,
• the implementation of the most interesting atomistic tools within conventional tools, activated transparently to the end users.

After the completion of the contract, our intention is to maintain the co-operative platform active and to allow access to interested laboratories and industries. For specific industrial dissemination, SIGMAPLUS company is already participating to the network and is in charge of this dissemination. Further, we intend to establish contracts with major software companies in the field to ensure the commercialisation of the products.

5 Training

* Appointment of Young Researchers

The minimum overall total of young researchers whose employment will be financed by the contract will be 204 person-months.

Table 2 summarizes the the breakdown of the young researchers between different participants and between pre-doctoral and post-doctoral.

	Participant	Young pre-doctoral researchers to be financed by the contract (person-months) (a)	Young post-doctoral researchers to be financed by the contract (person-months) (b)	Total (a+b)             (c)	Scientific specialities in which training will be provided     (d)
1	LAAS-CNRS	36	12	48	I-10
2	NMRC	0	45	45	I-10
3	CNM	44	6	50	I-10
4	SP	0	14	14	M-11
5	CUT	33	0	33	I-10
6	CEA-DAM	0	14	14	I-10
	Totals	113	91	204

The young researchers will be recruited among young graduate students. Vacancies will be published on the internet. All participants have already web sites on interent dedicated to the announcement of pre-doctoral and post-doctoral vacancies. In addition, to increase universality, the participants will also use the web pages available at "http://www.cordis.lu" site to advertise these vacancies.

The publication of vacancies on internet will promote equal opportunities between male and female researchers.

* Training Programme

The training programme is constituted around four major axes.

1 - The exchange of young researchers, PhD and postdocs, between participants involved in similar fields of investigation. The exchanges are of two types :

• the young students are submitted to the mobility, disseminating the competences of each member within the network,
• visiting periods from one laboratory to another will allow them to broaden their personnal skills as a result of complementarity of the work executed between labaoratories.

Visiting periods in industrial environment, outside the network, for the implementation of tools will be envisaged.

2 - Summer schools open to young researchers, to engineers already in the industry and to regular students at the post graduate level, not necessarily involved in the network, will be organised at the Mid Term and at the End of the project.

3 - The organisation of international and/or european conferences is the third axis. This concerns the whole scientific community, as well as engineers already in the industry. Two conferences, at Mid Term and at the End of the project are anticipated.

4 - Apart from the two above mentioned conferences, a large participation of scientists especially, but not exclusively, young researchers from the network members, to other international and european meetings is anticipated.

Finally, the set up of a co-operative platform using multimedia, to introduce the use of atomistic modelling in various practical conditions, and particularly in an industrial environment, constitutes a major element to broaden the skill of young researchers.

* Multidisciplinarity

The development of atomistic TCAD tools and their linking to conventional ones through co-operative networks and multimedia systems will involve three major disciplines :

• the physics of materials at the atomic scale for the model development,
• the computer science for the development and interfacing software packages,
• the communication network science for the set up of a co-operative platform.

All young members, PhD students and postdocs, engaged in the network will work on all three above aspects of the linking of atomistic TCAD tools. The above three aspects will also be present in the two summer schools organised by the network and will address young researchers as well as engineers in the industry.

* Connection with industry in the training programme

The link with industry is one of the components of the network actions. The training programme will also include connection to industrial companies. The connection with industry will be achieved in three ways.

1 - The double exchange between the academic and the industrial world. This will include the participation of industrial engineers to the two summer schools and to conferences, either as lecturers or trainees.
2 - The visiting periods of young researchers in the industry.
3 - The set up of a platform based on co-operative network and multimedia systems can only be achieved in connnection with industrial partners.