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INFRASTRUCTURES AND SUPPORT
| Missions : |
Maintenance and repair of the fluids networks :
- Air treatment
- DI water production
- Cooling water circulation equipment
- Processes gaz
- Gaz security
- Dry Air, vacuum, N2
- Centralized aspiration
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Infrastructures :
- Technical support : interface between the equipments and the collectives networks
- CAD of installations
- Interlocutors and interface with exogenous companies intervining in th eclean room
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Logistic :
- Reception and transfert of equipments
- Pure gazes managing
- Consumables managing: filters, valves, etc..
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Quality control:- clean room classs, humidity, etc..
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Support :
- Cleam room suits (more than 200)
- Consumables, small secutity equipments for the clean room
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| Equipments : |
4 new air power stations equipped with two humidifiers
Extraction System of air
Blowing: PC orders, 126 FFU
Deionised water Production:
- Pre-treatment: softener, activated carbon, osmosor
- Treatment: resin reads mixed, `' UV'', filtration 0,22µm
- Circulating pump
Cooling water central:
- Circulating pump 16M3/h -- 3Bars
- Frozen water exchanging T°: incoming 8°C outcoming 15°C
- Filtration 3µm
Network pure gases:
- About thirty different gases: Hydrogen, nitrogenises hydrogenated, argon, oxygen, ammonia, silane, disilane, dichlorosilane, helium ....... etc
Plants for Gas System safety gas:
- Sensor: furnace zone dangerous gas, EJM O2threshold
- Gas-scrubbing apparatus
- PC orders
Centralized Aspiration:
Empty power station:
- a pump in service + a pump as a spare
Quality control:
- Particulate measuring apparatus
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